Hexamethyldisilazane Other names: 1,1,1,3,3,3-Hexamethyldisilazane bis-(Trimethylsilyl)-amine Formula: C6H19NSi2 CAS: 999-97-3 Weight: 161,39 g/mol Boiling point: 125 °C Melting point: -78 °C Density: 0,7744 g/cm3